We are proposing a new X-Ray reflecto-interferometer method based on refractive optics. The focused x-ray beam produced by compound refractive lenses reflected from parallel flat surfaces creates an interference pattern in a wide angular range, which allows you to get information about the sample in one shot. The applicability of this method has been demonstrated at the ESRF ID06 beamline using X-rays from 10 to 20 keV and also using the MetalJet Excillium micro-focus laboratory source, which has GaKα emission line at 9.25 keV. We studied the Si3N4 free-standing membranes of thicknesses with the range from 100 to 1000 nm.

1.
K.
Stoev
and
K.
Sakurai
,
14
,
17
(
1997
).
2.
M.
Yasaka
,
9
(
2010
).
3.
E.
Chason
and
T.M.
Mayer
,
Critical Reviews in Solid State and Materials Sciences
22
,
1
(
1997
).
4.
T.P.
Russell
,
Materials Science Reports
5
,
171
(
1990
).
5.
J.W.
Shirley
,
American Journal of Physics
19
,
507
(
1951
).
6.
Albert
Thompson
,
David
Attwood
,
Eric
Gullikson
,
Malcolm
Howells
,
Kwang-Je
Kim
,
Janos
Kirz
,
Jeffrey
Kortright
,
Ingolf
Lindau
,
Yanwei
Liu
,
Piero
Pianetta
,
Arthur
Robinson
,
James
Scotfield
,
James
Underwood
,
Gwyn
Williams
,
H.
Winick
, and
A.С.
Thompson
, in edited by
Third (Center for X-ray Optics, Advanced Light Source, Berkeley
, California 94720,
2009
), pp.
176
176
.
7.
Kiessig
,
Annalen Der Physik
402
,
715
(
1931
).
8.
U.
Pietsch
,
V.
Holy
, and
T.
Baumbach
,
High-Resolution X-Ray Scattering: From Thin Films to Lateral Nanostructures
(
Springer
,
2004
).
9.
M.
Otendal
,
T.
Tuohimaa
,
U.
Vogt
, and
H.M.
Hertz
,
Review of Scientific Instruments
79
,
016102
(
2008
).
10.
V.
Kohn
,
I.
Snigireva
, and
A.
Snigirev
,
Optics Communications
216
,
247
(
2003
).
12.
A.
Snigirev
,
R.
Hustache
,
P.
Duboc
,
J.Y.
Massonnat
,
L.
Claustre
,
P.
Van Vaerenbergh
,
I.
Snigireva
,
M.
Grigoriev
, and
V.
Yunkin
,
Proceedings of SPIE
6705
,
670511
(
2007
).
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