A soft X-ray nanoscopy beamline (SXNB) at the Taiwan Photon Source (TPS) is designed to deliver photons of 90 – 2,500 eV from an elliptically polarized undulator to two state-of-the-art microscopy stations hosting the scanning transmission X-ray microscope (STXM) and the photoelectron related imaging and nanoscope (PRINS), respectively. The heart of SXNB is an active grating monochromator (AGM) that optimizes the flux and energy resolution at the same time while maintaining a stable focal spot on the sample. This article describes the design concept, optical layout, and simulation results of SXNB.
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