Adaptive x-ray mirrors are viewed as the main path to meeting the science and usability needs of the next generation of x-ray light sources. Curren tly these mirrors op erate open loop with intermittent feedback from invasive sensors that measure the beam quality. We outline a novel design for in situ metrology of the shape of these mirrors using an array of interferometric sensors. We describe a proof-of-principle demonstration showing sub-nm agreement between shape changes measured by this technique to simultaneous measurements by a large-aperture 18” Fizeau interferometer.
In-situ metrology for adaptive x-ray optics with an array of interferometric absolute distance measuring sensors
Vivek G. Badami, Ernesto Abruña, Lei Huang, Mourad Idir; In-situ metrology for adaptive x-ray optics with an array of interferometric absolute distance measuring sensors. AIP Conf. Proc. 15 January 2019; 2054 (1): 060027. https://doi.org/10.1063/1.5084658
Download citation file: