Adaptive x-ray mirrors are viewed as the main path to meeting the science and usability needs of the next generation of x-ray light sources. Curren tly these mirrors op erate open loop with intermittent feedback from invasive sensors that measure the beam quality. We outline a novel design for in situ metrology of the shape of these mirrors using an array of interferometric sensors. We describe a proof-of-principle demonstration showing sub-nm agreement between shape changes measured by this technique to simultaneous measurements by a large-aperture 18” Fizeau interferometer.

Topics
Metrology, X-ray optics, Interferometry, X-ray mirrors, Educational aids, Public policy and governance
1.
Advanced Photon Source Upgrade Project: Preliminary Design Report, Document Number: APSU-2.01-RPT-002, pg.
6
–
117
. (Sept
2017
)
2.
Ibid, pp. 6-6 - 6-20
3.
T.
 
Kimura
,
S.
 
Matsuyama
,
K.
 
Yamauchi
, and
Y.
 
Nishino
, "
Coherent x-ray zoom condenser lens for diffractive and scanning microscopy
,"
Optics Express
 
21
,
9267
–
9276
(
2013
).
https://doi.org/10.1364/OE.21.009267
Google Scholar
Crossref
Search ADS
PubMed
 
4.
H.
 
Mimura
 et al, "
Breaking the 10nm barrier in hard X-ray focusing
,"
Nature Physics
 
10
, pp.
122
–
125
(
2010
).
https://doi.org/10.1038/nphys1457
Google Scholar
Crossref
Search ADS
 
5.
R. J.
 
Boland
, "
Using linear variable differential transformers and ultrasonic transducers to measure flatness and parallelism for NIF optics
,"
Proc. SPIE 3782, Optical Manufacturing and Testing III
, (11 Nov
1999
).
Google Scholar
 
6.
R.
 
Biasi
,
D.
 
Gallieni
,
P.
 
Salinari
,
A.
 
Riccardi
, and
P.
 
Mantegazza
, "
Contactless thin adaptive mirror technology: past, present, and future
,"
Proc. SPIE
 
7736
,
77362B
(
2010
).
Google Scholar
 
7.
M.
 
Vannoni
,
I. F. Mar
 
tín
,
V.
 
Music
, and
H.
 
Sinn
, "
Calibration and optimization of an x-ray bendable mirror using displacement-measuring sensors
,"
Optics Express
 
24
,
17292
–
17302
(
2016
).
https://doi.org/10.1364/OE.24.017292
Google Scholar
Crossref
Search ADS
PubMed
 
8.
L. L.
 
Deck
, "
High-performance multi-channel fiber-based absolute distance measuring interferometer system
",
Proc. SPIE 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III
,
74050E
(21 Aug
2009
).
Google Scholar
 
9.
V. G.
 
Badami
 and
E.
 
Abruña
, "
Absolutely: Small Sensor, Big Performance
,"
Mikroniek
, Nr. 1, pp.
5
–
9
(
2018
).
Google Scholar
 
11.
E.
 
Abbe
, "
Messapparate fur Physiker
,"
Zeitschrift für Instrumentenkunde
 
10
,
446
–
448
(
1890
).
Google Scholar
 
This content is only available via PDF.
© 2019 Author(s).
2019
Author(s)