Nanopositioning techniques present an important capability to support the state-of-the-art synchrotron radiation instrumentation research for the Advanced Photon Source (APS) operations and upgrade project. To overcome the performance limitations of precision ball-bearing-based or roller-bearing-based stage systems, compact nanopositioning flexure stages have been designed and developed at the APS for x-ray beamline instrumentation applications. Recent progress of such stages development is discussed in this paper, which includes: rotary flexure stages with degrees travel range and 10-nrad-level resolution for x-ray monochromators and analysers, tip-tilting flexure stages for K-B mirror based nanofocusing hard x-ray optics, and linear vertical and horizontal nanopositioning flexure stages with centimeter-level travel range and microradian-level motion trajectory reproducibility for x-ray optics and sample manipulation. The mechanical design and preliminary test results are described in this paper.
Nanopositioning flexure stages development for synchrotron radiation instrumentation at the advanced photon source
Deming Shu, Steven Kearney, Jayson Anton; Nanopositioning flexure stages development for synchrotron radiation instrumentation at the advanced photon source. AIP Conf. Proc. 15 January 2019; 2054 (1): 060025. https://doi.org/10.1063/1.5084656
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