Improvement of the self-referenced lattice comparator: From using a pencil beam to a brush beam

We report improvement of the Self-referenced lattice comparator using a wide brush beam with size of 16 mm × 0.3 mm and a pair of one-dimensional position sensitive X-ray counters instead of using a pencil beam with size of 1 mm × 0.3 mm and a pair of PIN photodiode detector in the former system. The experimental time is accelerated by a factor of more than ten times. Since we use a brush beam for the measurement, the wavelength alone the horizontal beam width positions are different, it is necessary to establish a data correction procedure for the lattice comparator. We reported our first data after the system improved, the spatial resolution of mapping measurement reached to 0.5 mm × 0.3 mm, that is higher than the previous system.