Optomechanical design of compact laminar flexure bending mechanism for elliptically bent hard x-ray mirrors

As a part of the Argonne Strategic Partnership Project (SPP) 85E77, collaboration between Argonne National Laboratory (ANL) and Shanghai Institute of Applied Physics (SINAP), has produced designs for a precision compact flexure bending mechanism to provide elliptically shaped 90-mm and 160-mm long hard x-ray mirrors. The design utilizes Argonne’s laminar nanopositioning flexure technique. The flexure mirror bending mechanism will be incorporated into the beamline upgrade project at the Shanghai Synchrotron Radiation Facility (SSRF). Additionally, an Argonne Laboratory-Directed Research and Development (LDRD) project at the Advanced Photon Source (APS) has adopted a modified optomechanical design of the precision compact mirror benders for 300-mm-long hard x-ray mirrors with integrated profile monitoring and feedback, which are described in this paper. The mirror benders are designed with configurations for open-loop or closed-loop controls. Capacitive sensors can be applied to the mirror benders to ensure positioning reproducibility. Design specifications as well as finite element analyses results of the compact mirror benders for hard x-ray mirrors with trapezoid and rectangular shapes are discussed in this paper.