In the present study, we have analyzed the soft X-ray total electron yield and the reflection spectra of 300 Å ZrO2 thin film deposited by electron beam evaporation technique at various glancing angles near the O-K absorption edge region. The optical constants delta (δ) and beta (β) of the ZrO2 thin film is obtained by Kramers-Krönig analysis of the reflection spectrum measured at a glancing angle of 3°. The fine features appearing in the beta (β) spectrum matches well with the total electron yield spectrum measured at 3°.
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