The publication presents the results of own research on PVD technology using a cylindrical magnetron with a plasma cathode moving inside cylindrical ducts. The inspiration for the beginning of the research is an attempt to solve the problem of increasing the operational durability of heavily loaded elements of chemical installations, parts of machines and armament elements, including tubular and cylindrical surfaces. Covering the internal surface of ferritic steel pipe pipes requires the use of a magnetron with a circumference that does not disturb the plasma excitation process. In the operation of the CrN synthesis it has been shown that the coating can be made inside pipes using anodic polarization of the target (magnetic anode). In the process of CrN synthesis controlled by the optical signal of the OES clutch, the use of two impulse feeders for the substrate polarization of 100 kHz and a 0-100 kHz magnetron allowed to obtain a high kinetics of the CrN coating, k-20 um/h.

Topics
Magnetic fields, Radiowave and microwave technology, Chemical compounds
1.
H. E.
 
McKelvey
,
A rtatable magnetron sputtering apparatus
, (United States Patent 4,356,073,
1982
).
2.
Angstrom Sciences – Magnetron, Sputtering Technology & Sputtering Materials
, (Information on http://www.angstromsciences.com).
3.
Method of using cathode sputtering with rotating target audience
, (Europejski Biuletyn Patentowy EP 1722005 B12007/27,
2007
).
4.
W.P.
 
Leroy
,
S.
 
Mahieu
,
R.
 
De Gryse
,
D.
 
Depla
 
In search fr limits of ratting cylindrical magnetron sputtering
, (www.drzaft.ugent.be).
5.
J.
 
Walkowicz
,
Physico-chemical structure of the plasma and chemical and phase composition of the layers produced plasma surface engineering techniques)
, (
ITE Radom
,
2003
).
Google Scholar
 
7.
M.
 
Miller
,
Frank Campo Chromium Elimination in Medium Caliber Gun Barrels
, (
U.S. Army Benét Lab, SERDP Project WP-1426
January
2010
), pp.
1
–
37
.
Google Scholar
 
8.
A. L.
 
Roland
,
Investigation of Chemically Vapor Deposited Tantalum for Medium Caliber Gun Barrel Protection
, (
SERDP Project WP-1425 New Jersey Institute of Technology
October
2008
), pp.
1
–
10
.
Google Scholar
 
9.
F.
 
Campo
,
M.
 
Miller
,
J.
 
Walden
,
Chromium Elimination and Cannon Life Extension
, (
SERDP Project WP-201111, Benet Laboratories US Army RDECOM ARDEC
August 30,
2012
), pp.
1
–
25
.
Google Scholar
 
10.
L. F.
 
Rusch
,
D. J.
 
Vasilakis
,
G.
 
Ostrom
,
Tri-Service Green Gun Barrel
, (SERDP Project WP-1074 Final Report March 31,
2003
), pp.
1
–
39
.
11.
J. A.
 
Michael
,
Use of Electroplated Chromium in Gun Barrels
, (
US Army RDECOM-ARDEC-Benet Laboratories DoD Metal Finishing Workshop
,
Washington
, DC 22-23 May
2006
), pp.
1
–
41
.
Google Scholar
 
12.
M.
 
Betiuk
,
Cylindrical Magnetron with Dynamic Magnetic Field
, (
Solid State Phenomena
, Vol.
237
,
2015
), pp.
61
–
67
.
https://doi.org/10.4028/www.scientific.net/SSP.237.61
Google Scholar
Crossref
Search ADS
 
13.
M.
 
Betiuk
,
Powłoki CrN na wewnętrznych powierzchniach rur i cylindrów
, (
Inżynieria materiałowa
nr.
6
,
2013
) pp.
631
–
634
.
Google Scholar
 
14.
E. H.
 
Lock
,
Tz. B.
 
Petrova
,
G. M.
 
Petrov
,
D. R.
 
Boris
, and
S. G.
 
Walton
,
Electron beam-generated Ar/N2 plasmas: The effect of nitrogen addition on the brightest argon emission lines
, (
Physics of Plasmas
 
23
,
043518
,
2016
).
https://doi.org/10.1063/1.4946880
Google Scholar
Crossref
Search ADS
 
15.
O.
 
Rapaud
,
Ch.
 
Dong
,
D.
 
Mercs
,
Ch.
 
Coddetn
,
Fluence of RF bias on the deposition of CrN studied by OES
, (
Advanced Engineering Materials
,
10
(
7
), July
2008
), pp.
628
–
633
.
https://doi.org/10.1002/adem.200800053
Google Scholar
Crossref
Search ADS
 
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2018
Author(s)