The experimental and numerical investigations of synthesis of silica (SiO2) nanoparticles from premixed gaseous silicon tetrachloride (SiCl4) and oxygen of dry air in the high-temperature nitrogen flow of plasma-chemical reactor have been carried out. The regime of counter flow jet quenching of high-temperature heterogeneous flow has been utilized. The latter provided a rapid cooling of silica particles under nonequilibrium conditions with substantial temperature gradients. Synthesized silica particles were amorphous, with surface-average size being about 28 nm. The results of numerical calculations are found to agree qualitatively with experimental data.
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