Vanadium oxide (VxOy) multilayer sandwich structures previously studied by our group were found to yield a sensitive thermometer thin film material suitable for microbolometer applications. In this work, we aim to estimate the performance of a proposed air-bridge microbolometer configuration based on VxOy multilayer sandwich structure thermometer thin films. For this purpose, a microbolometer was fabricated on silicon (Si) substrate covered with a silicon nitride (Si3N4) insulating layer using VxOy thermometer thin film material. The fabricated microbolometer was patterned using electron-beam lithography and liftoff techniques and it was characterized in terms of its voltage repsonsivity (Rv), signal to noise ratio (SNR), noise equivalent power (NEP) and detectivity D*. A model was then developed by the aid of numerical optical/thermal simulations and experimentally measured parameters to estimate the performance of the microbolometer when fabricated in an air-bridge configuration. The estimated D* was found to be 1.55×107 cm.√Hz/ W.
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24 February 2017
PROCEEDINGS OF THE 6TH INTERNATIONAL ADVANCES IN APPLIED PHYSICS AND MATERIALS SCIENCE CONGRESS & EXHIBITION: (APMAS 2016)
1–3 June 2016
İstanbul, Turkey
Research Article|
February 24 2017
Fabrication and design of vanadium oxide microbolometer
M. Abdel-Rahman;
M. Abdel-Rahman
*
1Electrical Engineering Department, College of Engineering,
King Saud University
, Riyadh 11421, Saudi Arabia
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N. Al-Khalli;
N. Al-Khalli
1Electrical Engineering Department, College of Engineering,
King Saud University
, Riyadh 11421, Saudi Arabia
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M. F. Zia;
M. F. Zia
2Prince Sultan Advanced Technologies Research Institute (PSATRI), College of Engineering,
King Saud University
, Riyadh 11421, Saudi Arabia
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M. Alduraibi;
M. Alduraibi
3Physics and Astronomy Department, College of Science,
King Saud University
, Riyadh 11451, Saudi Arabia
4National Center for Applied Physics,
King Abdulaziz City for Science and Technology
, KACST, P.O. Box 6086, Riyadh 11442, Saudi Arabia
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B. Ilahi;
B. Ilahi
3Physics and Astronomy Department, College of Science,
King Saud University
, Riyadh 11451, Saudi Arabia
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E. Awad;
E. Awad
1Electrical Engineering Department, College of Engineering,
King Saud University
, Riyadh 11421, Saudi Arabia
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N. Debbar
N. Debbar
1Electrical Engineering Department, College of Engineering,
King Saud University
, Riyadh 11421, Saudi Arabia
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*
Corresponding author: mabdelrahman@ksu.edu.sa
AIP Conf. Proc. 1809, 020001 (2017)
Citation
M. Abdel-Rahman, N. Al-Khalli, M. F. Zia, M. Alduraibi, B. Ilahi, E. Awad, N. Debbar; Fabrication and design of vanadium oxide microbolometer. AIP Conf. Proc. 24 February 2017; 1809 (1): 020001. https://doi.org/10.1063/1.4975416
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