Copper oxide films were grown on silicon substrates by sol-gel dip coating method. In order to study the effects of annealing temperature on the properties of copper oxide films, the temperature was varied from 200 °C to 450 °C. In the process of dip coating, the substrate is withdrawn from the precursor solution with uniform velocity to obtain a uniform coating before undergoing an annealing process to make the copper oxide film polycrystalline. The physical properties of the copper oxide films were measured by an X-ray diffraction (XRD), a field emission scanning electron microscope (FESEM), an atomic force microscopy (AFM) and a four point probe instrument. From the XRD results, we found that pure cuprite (Cu2O) phase can be obtained by annealing the films annealed at 200 °C. Films annealed at 300 °C had a combination phase which consists of tenorite (CuO) and cuprite (Cu2O) phase while pure tenorite (CuO) phase can be obtained at 450 °C annealing temperature. The surface microstructure showed that the grains size is increased whereas the surface roughness is increased and then decreases by increasing in annealing temperature. The films showed that the resistivity decreased with increasing annealing temperature. Consequently, it was observed that annealing temperature has strong effects on the structural, morphological and electrical properties of copper oxide films.
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3 January 2017
INTERNATIONAL CONFERENCE ON ENGINEERING, SCIENCE AND NANOTECHNOLOGY 2016 (ICESNANO 2016)
3–5 August 2016
Solo, Indonesia
Research Article|
January 03 2017
Effect of annealing temperature on the properties of copper oxide films prepared by dip coating technique
N. A. Raship;
N. A. Raship
a)
1Microelectronics and Nanotechnology – Shamsuddin Research Centre,
Universiti Tun Hussein Onn Malaysia
, 86400 Parit Raja, Batu Pahat, Johor, Malaysia
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M. Z. Sahdan;
M. Z. Sahdan
b)
1Microelectronics and Nanotechnology – Shamsuddin Research Centre,
Universiti Tun Hussein Onn Malaysia
, 86400 Parit Raja, Batu Pahat, Johor, Malaysia
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F. Adriyanto;
F. Adriyanto
2Department of Physics,
Sebelas Maret University
, Surakarta, Indonesia
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M. F. Nurfazliana;
M. F. Nurfazliana
1Microelectronics and Nanotechnology – Shamsuddin Research Centre,
Universiti Tun Hussein Onn Malaysia
, 86400 Parit Raja, Batu Pahat, Johor, Malaysia
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A. S. Bakri
A. S. Bakri
1Microelectronics and Nanotechnology – Shamsuddin Research Centre,
Universiti Tun Hussein Onn Malaysia
, 86400 Parit Raja, Batu Pahat, Johor, Malaysia
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a)
Corresponding author: [email protected]
AIP Conf. Proc. 1788, 030121 (2017)
Citation
N. A. Raship, M. Z. Sahdan, F. Adriyanto, M. F. Nurfazliana, A. S. Bakri; Effect of annealing temperature on the properties of copper oxide films prepared by dip coating technique. AIP Conf. Proc. 3 January 2017; 1788 (1): 030121. https://doi.org/10.1063/1.4968374
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