3D simulation of the electric field distribution in the interelectrode gap of nanoscale field emission structure was carried out. Tip form of field emission cathode at nanometer interelectrode spacing and rounding-off radius of the top was investigated. Nanosized change of surface shape leads to the electric field heterogeneity. Influence of interelectrode spacing on the electric field distribution is taken into account in the test model. The difference of the electric field in the center and on the emitting surface edge was shown. It can be the cause of electron emission instability in strong electric fields.
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