A table-top soft x-ray microscope based on a long-term stable and nearly debris-free laser plasma from a pulsed nitrogen gas jet target is presented. The microscope operates in the “water window” region at 2.88 nm wavelength. The emitted soft x-ray radiation is focused by an ellipsoidal condenser mirror into the object plane and a sample is imaged using a Fresnel zone plate onto a CCD camera. The spatial resolution of the microscope is about 50 nm demonstrated for a Siemens star test pattern.
Table-top soft X-ray microscopy with a laser-induced plasma source based on a pulsed gas-jet
Matthias Müller, Tobias Mey, Jürgen Niemeyer, Maike Lorenz, Klaus Mann; Table-top soft X-ray microscopy with a laser-induced plasma source based on a pulsed gas-jet. AIP Conf. Proc. 30 August 2016; 1764 (1): 030003. https://doi.org/10.1063/1.4961137
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