A table-top soft x-ray microscope based on a long-term stable and nearly debris-free laser plasma from a pulsed nitrogen gas jet target is presented. The microscope operates in the “water window” region at 2.88 nm wavelength. The emitted soft x-ray radiation is focused by an ellipsoidal condenser mirror into the object plane and a sample is imaged using a Fresnel zone plate onto a CCD camera. The spatial resolution of the microscope is about 50 nm demonstrated for a Siemens star test pattern.
REFERENCES
1.
W.
Meyer-Ilse
, D.
Hamamoto
, A.
Nair
, S.
Levièvre
, G.
Denbeaux
, L.
Johnson
, A.
Pearson
, D.
Yager
, M.
Legros
, and C.
Larabell
, J. Microsc.
201
, 395
–403
(2000
).2.
C.
Larabell
and M.
Le Gros
, Mol. Biol. Cell
15
, 957
–962
(2004
).3.
M.
Juenger
, V.
Lamour
, P.
Monteiro
, E.
Gartner
, and G.
Denbeaux
, J. Mater. Sci. Lett.
22
, 1335
–1337
(2003
).4.
G.
Schneider
, Ultramicroscopy
75
, 85
–104
(1998
).5.
D.
Weiß
, G.
Schneider
, B.
Niemann
, P.
Guttmann
, D.
Rudolph
, and G.
Schmahl
, Ultramicroscopy
84
, 185
–197
(2000
).6.
J.
Clowney
, M.
LeGros
, C.
Mosley
, F.
Clowney
, E.
Markenskoff-Papadimitriou
, M.
Myllys
, G.
Barnea
, C.
Larabell
, and S.
Lomvardas
, Cell
151
, 724
–737
(2012
).7.
W.
Müller
, B.
Heymann
, K.
Nagashima
, P.
Guttmann
, S.
Werner
, S.
Rehbein
, G.
Schneider
and J.
McNally
, J. Struct. Biol.
177
, 179
–192
(2012
).8.
J.
Niclis
, S.
Murphy
, D.
Parkinson
, A.
Zedan
, A.
Sathananthan
, D.
Cram
, and P.
Heraud
, J. R. Soc. Interface
12
(2015
).9.
S.
Myneni
, J.
Brown
, G.
Martinez
, and W.
Meyer-Ilse
, Science
286
, 1335
–1337
(1999
).10.
W.
Chao
, P.
Fischer
, T.
Tyliszczak
, S.
Rekawa
, E.
Anderson
, and P.
Naulleau
, Opt. Express
20
, 9777
–9783
(2012
).11.
M.
Berglund
, L.
Rymell
, M.
Peuker
, T.
Wilhein
, and H.
Hertz
, J. Microsc.
197
, 268
–273
(2000
).12.
P.
Jansson
, U.
Vogt
, and H.
Hertz
, Rev. Sci. Instrum.
76
, 043503
(2005
).13.
P.
Takmann
, H.
Stollberg
, G.
Johansson
, A.
Holmberg
, M.
Lindholm
, and H.
Hertz
, J. Microsc.
226
, 175
–181
(2007
).14.
M.
Benk
, K.
Bergmann
, D.
Schäfer
, and T.
Wilhein
, Opt. Lett.
33
, 2359
–2361
(2008
).15.
H.
Legall
, G.
Blobel
H.
Stiel
, W.
Sandner
, C.
Seim
, P.
Takman
, D.
Martz
, M.
Selin
, U.
Vogt
, H.
Hertz
, D.
Esser
, H.
Sipma
, J.
Luttmann
, M.
Höfer
, H.
Hoffmann
, S.
Yulin
, T.
Feigl
, S.
Rehbein
, P.
Guttmann
, G.
Schneider
, U.
Wiesemann
, M.
Wirtz
, and W.
Diete
, Opt. Express
20
, 18362
–18369
(2012
).16.
H.
Fiedorowicz
, A.
Bartnik
, Z.
Patron
, and P.
Piotr
, Appl. Phys. Lett.
62
, 2778
–2780
(1993
).17.
S.
Kranzusch
and K.
Mann
, Opt. Commun.
200
, 223
–230
(2001
).18.
F.
Barkusky
, C.
Peth
, A.
Bayer
, and K.
Mann
, J. Appl. Phys.
101
, 124908
(2007
).19.
A.
Bartnik
, H.
Fiedorowicz
, R.
Jarocki
, J.
Kostecki
, A.
Szczurek
, and M.
Szczurek
, Appl. Phys. B
96
, 727
–730
(2009
).20.
C.
Peth
, F.
Barkusky
, and K.
Mann
, J. Phys. D: Appl. Phys.
41
, 105202
–105207
(2008
).21.
M.
Müller
, T.
Mey
, J.
Niemeyer
, and K.
Mann
, Opt. Express
22
, 23489
–23495
(2014
).22.
P.
Wachulak
, A.
Torrisi
, A.
Bartnik
, D.
Adjei
, J.
Kostecki
, L.
Wegrzynski
, R.
Jarocki
, M.
Szczurek
, H.
Fiedorowicz
, Appl. Phys. B
118
, 573
–578
(2015
).23.
G.
Kubiak
and M.
Richardson
, US Patent 5,577,092 (1996
).24.
H.
Fiedorowicz
, A.
Bartnik
, H.
Daido
, I.
Choi
, M.
Suzuki
, and S.
Yamagami
, Opt. Commun.
184
, 161
–167
(2000
).25.
T.
Mey
, M.
Rein
, P.
Großmann
, and K.
Mann
, N. J. Phys.
14
, 073045
(2012
).26.
S.
Kranzusch
, C.
Peth
, and K.
Mann
, Rev. Sc. Instrum.
74
, 969
–974
(2003
).27.
A.
Bayer
, F.
Barkusky
, S.
Döring
, P.
Großmann
, and K.
Mann
, X-ray Opt. Instrum.
2010
, 1
–9
(2010
).28.
B.
Henke
, E.
Gullikson
, and J.
Davis
, Data Tables
54
, 181
–342
(1993
).29.
M.
Müller
, F.
Kühl
, P.
Großmann
, P.
Vrba
, and K.
Mann
, Opt. Express
21
, 12831
–12842
(2013
).
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