Development of contamination-free x-ray optics for next-generation light sources

We studied typical forms of contamination on X-ray mirrors that cause degradation of beam quality, investigated techniques to remove the contaminants, and propose methods to eliminate the sources of the contamination. The total amount of carbon-containing substances on various materials in the vicinity of a mirror was measured by thermal desorption-gas chromatography/mass spectrometry and thermal desorption spectroscopy. It was found that cleanliness and ultra-high vacuum techniques are required to produce the contamination-free surfaces that are essential for the propagation of high-quality X-ray beams. The reduction of carbonaceous residue adsorbed on the surfaces, and absorbed into the bulk, of the materials in the vicinity of the mirrors is a key step toward achieving contamination-free X-ray optics.