We have investigated optical properties of Ta-doped TiO2 thin film on LaAlO3 (LAO) substrate using Spectroscopic Ellipsometry (SE) at room temperature. Amplitude ratio Ψ and phase difference L1 between p- and s- polarized light waves are obtained by multiple incident angles measurement (60°, 70°, and 80°) at energy range of 0.5 – 6.5 eV. In order to obtain optical properties for every Ta concentrations (0.01, 0.4, and 5 at. %), multilayer modelling was performed simultaneously by using Drude-Lorentz model. Refractive index and optical dispersion parameters were determined by Wemple-DiDomenico relation. In general, refractive index at zero photon energy n(0) increases by increasing Ta concentration. Furthermore, optical band gap shows a significant increasing due to presence of Ta dopant. In addition, other optical constants are discussed as well.
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19 April 2016
THE 3RD INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS SCIENCE AND TECHNOLOGY (ICAMST 2015)
6–7 October 2015
Semarang, Indonesia
Research Article|
April 19 2016
Effect of Ta concentration on the refractive index of TiO2:Ta studied by spectroscopic ellipsometry
Eka Nurfani;
Eka Nurfani
a)
1Department of Physics,
Institut Teknologi Bandung
, Ganesa 10 Bandung 40132, Indonesia
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Robi Kurniawan;
Robi Kurniawan
1Department of Physics,
Institut Teknologi Bandung
, Ganesa 10 Bandung 40132, Indonesia
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Shibghatullah Muhammady;
Shibghatullah Muhammady
1Department of Physics,
Institut Teknologi Bandung
, Ganesa 10 Bandung 40132, Indonesia
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Resti Marlina;
Resti Marlina
1Department of Physics,
Institut Teknologi Bandung
, Ganesa 10 Bandung 40132, Indonesia
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Inge M. Sutjahja;
Inge M. Sutjahja
1Department of Physics,
Institut Teknologi Bandung
, Ganesa 10 Bandung 40132, Indonesia
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Toto Winata;
Toto Winata
1Department of Physics,
Institut Teknologi Bandung
, Ganesa 10 Bandung 40132, Indonesia
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Andrivo Rusydi;
Andrivo Rusydi
1Department of Physics,
Institut Teknologi Bandung
, Ganesa 10 Bandung 40132, Indonesia
2Singapore Synchrotron Light Source,
National University of Singapore
, 5 Research Link, Singapore 117603, Singapore
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Yudi Darma
Yudi Darma
b)
1Department of Physics,
Institut Teknologi Bandung
, Ganesa 10 Bandung 40132, Indonesia
2Singapore Synchrotron Light Source,
National University of Singapore
, 5 Research Link, Singapore 117603, Singapore
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a)
Corresponding author: ekanurfani@gmail.com
AIP Conf. Proc. 1725, 020057 (2016)
Citation
Eka Nurfani, Robi Kurniawan, Shibghatullah Muhammady, Resti Marlina, Inge M. Sutjahja, Toto Winata, Andrivo Rusydi, Yudi Darma; Effect of Ta concentration on the refractive index of TiO2:Ta studied by spectroscopic ellipsometry. AIP Conf. Proc. 19 April 2016; 1725 (1): 020057. https://doi.org/10.1063/1.4945511
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