Rutherford backscattering spectroscopy (RBS) has been an important analytical method for determination of the depth distribution of elemental concentrations in materials. The depth resolution of RBS is typically limited by the energy resolution of ion detectors. In this work we demonstrate the use of a compact magnetic spectrometer as the ion energy detector for high resolution RBS analysis. The magnetic spectrometer offers several advantages: (1) a high energy resolution ΔE/E∼1/2000; (2) a large bending power for MeV ions; and (3) a particular configuration allowing for true 180° RBS analysis. By combining this magnetic spectrometer with the grazing angle geometry, we have achieved a depth resolution better than 5 Å for RBS analysis of concentration distributions in elemental (e.g., Ta) and compound (e.g. ) thin films using 2 MeV helium ions. These experimental results suggest that high‐resolution characterization of nanoscale thin films can be realized using MeV ions in conjunction with such magnetic spectrometers.
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28 September 2009
FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009
11–15 May 2009
Albany (New York)
Research Article|
September 28 2009
High‐Resolution Rutherford Backscattering Analysis of Nanoscale Thin Films
J. D. LaRose;
J. D. LaRose
aDepartment of Physics, University at Albany, 1400 Washington Avenue, Albany, NY 12222
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M. Huang;
M. Huang
bCollege of Nanoscale Science and Engineering, University at Albany, 255 Fuller Rd. Albany, NY, 12203
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E. Bersch;
E. Bersch
bCollege of Nanoscale Science and Engineering, University at Albany, 255 Fuller Rd. Albany, NY, 12203
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M. Di;
M. Di
bCollege of Nanoscale Science and Engineering, University at Albany, 255 Fuller Rd. Albany, NY, 12203
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A. C. Diebold;
A. C. Diebold
bCollege of Nanoscale Science and Engineering, University at Albany, 255 Fuller Rd. Albany, NY, 12203
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S. Consiglio;
S. Consiglio
cTEL Technology Center, America, LLC, 225 Fuller Rd. Albany, NY, 12203
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R. D. Clark;
R. D. Clark
cTEL Technology Center, America, LLC, 225 Fuller Rd. Albany, NY, 12203
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G. J. Leusink
G. J. Leusink
cTEL Technology Center, America, LLC, 225 Fuller Rd. Albany, NY, 12203
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J. D. LaRose
a
M. Huang
b
E. Bersch
b
M. Di
b
A. C. Diebold
b
S. Consiglio
c
R. D. Clark
c
G. J. Leusink
c
aDepartment of Physics, University at Albany, 1400 Washington Avenue, Albany, NY 12222
bCollege of Nanoscale Science and Engineering, University at Albany, 255 Fuller Rd. Albany, NY, 12203
cTEL Technology Center, America, LLC, 225 Fuller Rd. Albany, NY, 12203
AIP Conf. Proc. 1173, 80–83 (2009)
Citation
J. D. LaRose, M. Huang, E. Bersch, M. Di, A. C. Diebold, S. Consiglio, R. D. Clark, G. J. Leusink; High‐Resolution Rutherford Backscattering Analysis of Nanoscale Thin Films. AIP Conf. Proc. 28 September 2009; 1173 (1): 80–83. https://doi.org/10.1063/1.3251265
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