TPS 31A fast tomography and energy-resolved elemental mapping projection X-ray microscopy (PXM) and transmission X-ray microscopy (TXM) beamline of NSRRC is under construction and commissioning. This beamline will provide four operating modes including (1) PXM with white light mode, (2) PXM with double multilayer monochromator (DMM) mode, (3) PXM with double crystal monochromator (DCM) mode, and (4) TXM with double crystal monochromator (DCM) mode. All modes are capable of absorption contrast and phase contrast of images. The spatial resolution of three PXM modes is 0.5 µm. The field of view of PXM-white light, PXM-DMM, and PXM-DCM mode is 25×18 cm2, 25×10 mm2 and 25×3 mm2, respectively. The temporal resolution of PXM modes can approach 1ms/frame and 45 sec/tomography. The in operando tomography and energy-resolved elemental mapping within 2D image as well as tomography are feasible. The spatial resolution and field of view of TXM mode is expected as 30 nm and 30 µm, respectively. The energy-resolved elemental mapping within 2D image and tomography is practical.
Research Article|
September 27 2023
Fast tomography projection x-ray microscopy and transmission x-ray microscopy beamline at TPS of NSRRC
Yen-Fang Song;
Yen-Fang Song
a)
1
National Synchrotron Radiation Research Center
, Hsinchu 30076, Taiwan
a)Corresponding author: song@nsrrc.org.tw
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Chao-Chih Chiu;
Chao-Chih Chiu
1
National Synchrotron Radiation Research Center
, Hsinchu 30076, Taiwan
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Ming-Han Lee;
Ming-Han Lee
1
National Synchrotron Radiation Research Center
, Hsinchu 30076, Taiwan
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Bo-Yi Chen;
Bo-Yi Chen
1
National Synchrotron Radiation Research Center
, Hsinchu 30076, Taiwan
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Liang-Chih Chiang;
Liang-Chih Chiang
1
National Synchrotron Radiation Research Center
, Hsinchu 30076, Taiwan
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Chin-Yen Liu;
Chin-Yen Liu
1
National Synchrotron Radiation Research Center
, Hsinchu 30076, Taiwan
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Chia-Feng Chang;
Chia-Feng Chang
1
National Synchrotron Radiation Research Center
, Hsinchu 30076, Taiwan
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Chien-Yu Lee;
Chien-Yu Lee
1
National Synchrotron Radiation Research Center
, Hsinchu 30076, Taiwan
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Ming-Ying Hsu;
Ming-Ying Hsu
1
National Synchrotron Radiation Research Center
, Hsinchu 30076, Taiwan
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Shang-Wei Lin;
Shang-Wei Lin
1
National Synchrotron Radiation Research Center
, Hsinchu 30076, Taiwan
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Gung-Chian Yin
Gung-Chian Yin
b)
1
National Synchrotron Radiation Research Center
, Hsinchu 30076, Taiwan
b)Co-Corresponding author: gcyin@nsrrc.org.tw
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a)Corresponding author: song@nsrrc.org.tw
b)Co-Corresponding author: gcyin@nsrrc.org.tw
AIP Conf. Proc. 2990, 040001 (2023)
Citation
Yen-Fang Song, Chao-Chih Chiu, Ming-Han Lee, Bo-Yi Chen, Liang-Chih Chiang, Chin-Yen Liu, Chia-Feng Chang, Chien-Yu Lee, Ming-Ying Hsu, Shang-Wei Lin, Gung-Chian Yin; Fast tomography projection x-ray microscopy and transmission x-ray microscopy beamline at TPS of NSRRC. AIP Conf. Proc. 27 September 2023; 2990 (1): 040001. https://doi.org/10.1063/5.0168147
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