Thin dielectric films of different materials (SiO2 and Al2O3) with embedded gold nanoclusters were deposited by magnetron co‐sputtering. The influence of the gold nanoclusters concentration and the host matrix material on the optical response of the system was studied by spectroscopic ellipsometry (SE) in the 450 nm÷700 nm spectral range.

Topics
Radiowave and microwave technology, Sputter deposition, Thin films, Nanoclusters, Optical metrology, Metal oxides, Transition metals
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© 2007 American Institute of Physics.
2007
American Institute of Physics
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