Combinatorial in situ Growth‐and‐Analysis with Synchrotron Radiation of Thin Films for Oxide Electronics

We have developed a combinatorial in situ growth‐and‐analysis system combining thin film growths by laser molecular beam epitaxy (MBE) with synchrotron radiation photoemission spectroscopy and X‐ray absorption spectroscopy to investigate electronic structures of strongly correlated oxide systems, especially La_1−xSr_xMnO₃ (LSMO) for tunneling magnetoresistance device applications. For combinatorial high‐throughput analysis, we have developed a computer‐controlled manipulator. The usefulness of combinatorial in situ analysis was verified by resonant photoemission and angle‐resolved photoemission spectroscopy of Mn 3d e_g derived majority band of compositional spread LSMO with various Sr compositions and thickness‐dependent core‐level shifts reflecting band bending.