Fresnel zone plates have been highly successful as focusing and imaging optics for soft x-ray microscopes and microprobes. More recently, with the advent of third-generation high-energy storage rings, zone plates for the hard x-ray regime have been put to use as well. The performance of zone plates manufactured using a combination of electron-beam lithography and x-ray lithography is described.

Topics
Energy storage, Hard X-rays, X-ray lithography, Microscopy, Microprobe, Electron-beam lithography, Zone plates
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© 2000 American Institute of Physics.
2000
American Institute of Physics
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