In this study, chemical solution-grown ZnO (CS-ZnO) nanomaterials were prepared via a benign, ultrasonicated low-temperature solution immersion route. The humidity sensor was constructed using CS-ZnO nanomaterials by a simple brush printing technique. This research aimed to explore the humidity sensing attributes and investigate their correlation to surface, structural, and chemical association. The structural (i.e., crystallinity, morphology, and phonon characteristics), and surface characteristics exhibited in the CS-ZnO nanomaterials were characterized through X-ray diffraction (XRD), field emission scanning electron microscopy with energy dispersive X-ray spectroscopy (FESEM with EDS), Raman spectroscopy, X-ray photoelectron spectrometer (XPS) and reflection electron energy-loss spectroscopy (REELS). The humidity sensor utilizing CS-ZnO nanomaterials exhibited acceptable resistance changes along with an adequate sensor resistance ratio and sensitivity of 33.89 ± 2.25 and 4.95 ± 0.11 MΩ/%RH, respectively. The sensor demonstrated a maximum sensing response of 97.08 ± 0.11 and reliable repeatability behaviour within the relative humidity range of 40 to 90 % RH. The preparation of the CS-ZnO as a sensing material provides a unique direction for designing a cost-effective and highly sensitive humidity monitoring sensor.
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3 July 2025
3RD INTERNATIONAL CONFERENCE ON SEMICONDUCTOR MATERIALS AND TECHNOLOGY (3rd ICoSeMT 2023)
18–19 September 2023
Georgetown, Malaysia
Research Article|
July 03 2025
Fabrication of chemical solution grown zinc oxide nanomaterials for humidity sensing applications Available to Purchase
A. S. R. A. Subki;
A. S. R. A. Subki
a)
1
NANO-ElecTronic Centre, School of Electrical Engineering, College of Engineering, Universiti Teknologi MARA
, 40450 Shah Alam, Selangor, Malaysia
3
Faculty of Electronic and Computer Technology and Engineering, Universiti Teknikal Malaysia Melaka
, Hang Tuah Jaya, 76100 Durian Tunggal, Melaka, Malaysia
a)Corressponding author: [email protected]
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M. H. Mamat;
M. H. Mamat
b)
1
NANO-ElecTronic Centre, School of Electrical Engineering, College of Engineering, Universiti Teknologi MARA
, 40450 Shah Alam, Selangor, Malaysia
2
NANO-SciTech Lab, Centre for Functional Materials and Nanotechnology, Institute of Science, Universiti Teknologi MARA
, 40450 Shah Alam, Selangor, Malaysia
b)Corressponding author: [email protected]
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D. Kamaruzaman;
D. Kamaruzaman
1
NANO-ElecTronic Centre, School of Electrical Engineering, College of Engineering, Universiti Teknologi MARA
, 40450 Shah Alam, Selangor, Malaysia
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M. Z. Musa;
M. Z. Musa
1
NANO-ElecTronic Centre, School of Electrical Engineering, College of Engineering, Universiti Teknologi MARA
, 40450 Shah Alam, Selangor, Malaysia
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N. Parimon;
N. Parimon
4
Faculty of Engineering, Universiti Malaysia Sabah
, 88400 Kota Kinabalu, Sabah, Malaysia
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N. Vasimalai;
N. Vasimalai
5
School of Physical and Chemical Sciences, B.S. Abdur Rahman Crescent Institute of Science & Technology
, Vandalur, Chennai 600048, India
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A. B. Suriani;
A. B. Suriani
6
Nanotechnology Research Centre, Faculty of Science and Mathematics, Universiti Pendidikan Sultan Idris
, 35900 Tanjung Malim, Perak, Malaysia
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M. K. Ahmad
M. K. Ahmad
7
Microelectronic and Nanotechnology–Shamsuddin Research Centre (MiNT-SRC), Faculty of Electrical and Electronic Engineering, Universiti Tun Hussein Onn Malaysia
, 86400 Batu Pahat, Johor, Malaysia
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A. S. R. A. Subki
1,3,a)
M. H. Mamat
1,2,b)
D. Kamaruzaman
1
M. Z. Musa
1
N. Parimon
4
N. Vasimalai
5
A. B. Suriani
6
M. K. Ahmad
7
1
NANO-ElecTronic Centre, School of Electrical Engineering, College of Engineering, Universiti Teknologi MARA
, 40450 Shah Alam, Selangor, Malaysia
3
Faculty of Electronic and Computer Technology and Engineering, Universiti Teknikal Malaysia Melaka
, Hang Tuah Jaya, 76100 Durian Tunggal, Melaka, Malaysia
2
NANO-SciTech Lab, Centre for Functional Materials and Nanotechnology, Institute of Science, Universiti Teknologi MARA
, 40450 Shah Alam, Selangor, Malaysia
4
Faculty of Engineering, Universiti Malaysia Sabah
, 88400 Kota Kinabalu, Sabah, Malaysia
5
School of Physical and Chemical Sciences, B.S. Abdur Rahman Crescent Institute of Science & Technology
, Vandalur, Chennai 600048, India
6
Nanotechnology Research Centre, Faculty of Science and Mathematics, Universiti Pendidikan Sultan Idris
, 35900 Tanjung Malim, Perak, Malaysia
7
Microelectronic and Nanotechnology–Shamsuddin Research Centre (MiNT-SRC), Faculty of Electrical and Electronic Engineering, Universiti Tun Hussein Onn Malaysia
, 86400 Batu Pahat, Johor, Malaysia
a)Corressponding author: [email protected]
b)Corressponding author: [email protected]
AIP Conf. Proc. 3310, 020001 (2025)
Citation
A. S. R. A. Subki, M. H. Mamat, D. Kamaruzaman, M. Z. Musa, N. Parimon, N. Vasimalai, A. B. Suriani, M. K. Ahmad; Fabrication of chemical solution grown zinc oxide nanomaterials for humidity sensing applications. AIP Conf. Proc. 3 July 2025; 3310 (1): 020001. https://doi.org/10.1063/5.0277290
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