This paper discusses synthesis and characterization of high-κ dielectric zirconium oxide (ZrO2) nanoparticles by using thermal treatment method. Zirconium tetrachloride (ZrCl4) and water is used to synthesize zirconium oxide (ZrO2). A thin film of ZrO2 was deposited on an ITO coated glass by using electrochemical deposition (ECD) technique. The thickness of the deposited layer is measured and found to be ∼10 nm. The synthesized powder of ZrO2 was investigated and characterized to analyse the structural and optical properties by using different imaging techniques such as transmission electron microscopy (TEM), X-ray diffraction (XRD) and Fourier transform infrared spectroscopy (FTIR). At calcination temperature of 600℃, the tetragonal phase of ZrO2 from XRD spectra is revealed. The crystalline phase of ZrO2 is confirmed from FTIR spectra. The ZrO2 film deposited on ITO coated glass was imaged by Scanning electron microscopy (SEM) technique. The elements, zirconium and oxygen present in the sample is confirmed by TEM and SEM analysis. and shows smooth surface morphologies. SEM analysis also confirms the microstructure of the nanoparticles. TEM images show the average size of ZrO2 particles is less than 52 nm. The ZrO2 film was characterised by cyclic voltammetry (CV) test in phosphate buffer solution (PBS) of 0.1 M KOH at 100 mV/s scan rate. The interfacial properties of the deposited film were analyzed by Electrochemical impedance spectroscopy (EIS).
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13 October 2023
COMPUTATIONAL ENGINEERING AND MACHINE LEARNING ALGORITHMS
17–18 November 2022
Kollam, Kerala
Research Article|
October 13 2023
Synthesis and characterization of high-κ dielectric zirconium oxide for biosensor applications
Dhruba Jyoti Hazarika;
Dhruba Jyoti Hazarika
a)
a) Corresponding author: [email protected]
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AIP Conf. Proc. 2904, 110001 (2023)
Citation
Dhruba Jyoti Hazarika, Hiranya Ranjan Thakur, Jiten Chandra Dutta; Synthesis and characterization of high-κ dielectric zirconium oxide for biosensor applications. AIP Conf. Proc. 13 October 2023; 2904 (1): 110001. https://doi.org/10.1063/5.0170557
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