ZnO:Cu thin films have been fabricated using ultrafast spray pyrolysis at 450°C for 20 s. Post-annealing treatments were conducted at 400 ℃ for 30 minutes under ambient conditions. As a result, the hexagonal wurtzite crystal structure is detected from X-ray diffraction measurements. After post-annealing treatment, crystal orientation is highly oriented along the (002) plane. Films are re-crystallized during the annealing, resulting in a decrease of lattice strain and an increase of crystallinity. Furthermore, annealing also provokes an increase in photoconductivity as well as UV sensitivity. This study is important to develop an oxide-based UV photodetector in the mass-production rate with low fabrication costs.

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