Design and development of MEMS based accelerometer for monitoring of engine health

The goal of this project is to model and optimize mechanical components for a micro machinable accelerometer with a specific frequency range. According to a review of the literature, research in this area is mostly focused on enhancing microfabrication and allowing electronic circuitry to be modified. To overcome this problem, a spring mass system is adopted to control the motion(displacement) in desired axis. The linearity of the suspension is increased by using a U-folded design. The accelerometer's proof mass is constructed with a thickness five times that of other components. This arrangement gives advantage of selecting a convenient electronic circuitry and mounting of components required on proof mass. For the desired frequency, design parameters such as the breadth, depth, and length of the proof mass are computed analytically. The proof mass, beams and guiding support assembly for accelerometer is designed using Autodesk Fusion 360 Software, the design is further simulated to work under influence of 1g force using Ansys 2019 student version software and comparison of simulation results are done with analytical calculations.