High-entropy alloys (HEAs) are a new class of metal materials, which have a unique combination of mechanical, tribological, physical, chemical and other properties. The purpose of the present work is to obtain new knowledge about the structure and properties of high-entropy alloys synthesized in the form of thin films on the surface of metals and alloys by the electron-ion-plasma method. The films of following composition (at %): Ti (25.7), Al (17.0), Nb (21.9), Zr (22.3), Cu (13.1), were synthesized and investigated. It has been shown that the films are laminated and have an amorphous-crystal structure. Microhardness of HEAs films varies from 10.7 to 17.5 GPa.
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