In this study, samples of AISI 321 stainless steel with different initial structure and phase composition were treated with single pulses of a high-power ion beam at the TEMP 4-M accelerator. At an accelerating voltage of 250 keV and a pulse duration of 100 ns, the energy density of a single pulse was 1 J/cm2. Changes in the surface topography, structure and phase composition of the near-surface layers of steel after exposure to high-power pulsed ion beam are investigated by scanning electron microscopy and X-ray diffraction analysis. The estimation of residual microstresses was carried out by the Williamson-Hall method.
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