The InGaP(001) <110>, <ī10> surface which have point defect on the surface were studied by low enrgy ion scattering spectroscopy. The characteristic trajectories scattered ions from defects calculated by the by the computer simulation method. It has been established that the influence of defect to the energy spectrum of scattered ions. The ions scattered from defect multi component surface formed additional peaks on the energy spectrum.

Topics
Crystallographic defects, Ion scattering spectroscopy
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