This article presents some results concerning the oxidation of metallic Zn films as well as the films with Au, Al, Cu additives in a 9: 1 ratio. The total thickness of the initial metal films was about 100 nm. At the first stage, Zn films were deposited on quartz substrates by magnetron sputtering in Argon followed by doping with Au, Al, and Cu. At the second stage, the samples were heated to T ≈ 400-410 ° C in dry air. The optical density of ZnO films doped with metal in the wavelength range of 200-1100 nm was measured.
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