In this paper, we present the results of an experimental study of the processes of local profiling of a material surface by a focused ion beam. The regularities of the influence of the main technological parameters of etching by the FIB method on the surface roughness of the substrate were established experimentally. It was revealed that the main factors affecting the formation of the surface relief of a solid when etched by a focused ion beam are: FIB overlap, the beam dwell time, and the ion beam current. It is shown that when the overlap is about 30-50%, the substrate roughness is minimal, and the FIB current and the beam dwell do not exert a determining influence on the roughness. The obtained results can be used to develop technological processes for the fabrication of the structures and elements for micro- and nanoelectronics.
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15 January 2019
STATE-OF-THE-ART TRENDS OF SCIENTIFIC RESEARCH OF ARTIFICIAL AND NATURAL NANOOBJECTS, STRANN-2018
17–19 October 2018
Moscow, Russia
Research Article|
January 15 2019
Investigation of the local profiling of the solid surfaces using focused ion beam
Ivan Panchenko;
Ivan Panchenko
a)
Southern Federal University, Institute of Nanotechnologies, Electronics and Equipment Engineering
, 2 Shevchenko Street, Taganrog 347922 Russian Federation
a)Corresponding author: ivpanchenko@sfedu.ru
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Nikita Shandyba;
Nikita Shandyba
b)
Southern Federal University, Institute of Nanotechnologies, Electronics and Equipment Engineering
, 2 Shevchenko Street, Taganrog 347922 Russian Federation
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Alexey Kolomiytsev;
Alexey Kolomiytsev
c)
Southern Federal University, Institute of Nanotechnologies, Electronics and Equipment Engineering
, 2 Shevchenko Street, Taganrog 347922 Russian Federation
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Alexandr Gromov;
Alexandr Gromov
d)
Southern Federal University, Institute of Nanotechnologies, Electronics and Equipment Engineering
, 2 Shevchenko Street, Taganrog 347922 Russian Federation
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Oleg Ageev
Oleg Ageev
e)
Southern Federal University, Institute of Nanotechnologies, Electronics and Equipment Engineering
, 2 Shevchenko Street, Taganrog 347922 Russian Federation
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a)Corresponding author: ivpanchenko@sfedu.ru
AIP Conf. Proc. 2064, 030011 (2019)
Citation
Ivan Panchenko, Nikita Shandyba, Alexey Kolomiytsev, Alexandr Gromov, Oleg Ageev; Investigation of the local profiling of the solid surfaces using focused ion beam. AIP Conf. Proc. 15 January 2019; 2064 (1): 030011. https://doi.org/10.1063/1.5087673
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