InGaN/GaN QDs nanorod structure for the fabrication of light-emitting diodes by means of plasma-chemical etching is presented. Processes of the etching of nanorods and the defect passivation are studied. The obtained results can be used to create the light-emitting diode nanostructure with a greater efficiency compared to the classical planar technology.
REFERENCES
1.
Yu-Lin
Tsai
, Kun-Yu
Lai
, Ming-Jui
Lee
, Yu-Kuang
Liao
, Boon S.
Ooi
, Hao-Chung
Kuo
, Jr-Hau
He
, PROG QUANT ELECTRON
49
, 1
–25
, (2016
).2.
G. F.
Yang
, F.
Xie
, Y. Y.
Tong
, P.
Chen
, Z. G.
Yu
, D. W.
Yan
, J. J.
Xue
, H. X.
Zhu
, Y.
Guo
, G. H.
Li
, S. M.
Gao
, Mater. Sci. Semicond. Process.
30
, 694
–706
(2015
).3.
J.
Bai
, Q.
Wang
, and T.
Wang
, J. Appl. Phys.
111
, 113103
, (2012
).4.
Zetian
Mi
, Yong-Ho
Ra
, Roksana
Rashid
, Renjie
Wang
, and Ishiang
Shih
, IEEE
, 137
–148
(2017
)5.
6.
K. P.
Kotlyar
, B. I.
Soshnikov
, I. A.
Morozov
, D. A.
Kudryashov
, K. S.
Zelentsov
, V. V.
Lysak
, I. P.
Soshnikov
, JPCS
741
, 012083
, (2016
).7.
D.
Paramanik
, A.
Motayed
, G. S.
Aluri
, S.
Krylyuk
, A. V.
Davydov
, M.
King
, S.
McLaughlin
, S.
Guptac
, H.
Cramer
, B.
Nikoobakht
, Proc. of SPIE
8373
, 1
–10
(2012
).8.
Liang-Yi
Chen
, Ying-Yuan
Huang
, Chun-Hsiang
Chang
, Yu-Hsuan
Sun
, Yun-Wei
Cheng
, Min-Yung
Ke
, Cheng-Pin
Chen
, and Jian-Jang
Huang
, Opt. Express
, 18
(8
), 7664
–7669
(2010
).
This content is only available via PDF.
© 2019 Author(s).
2019
Author(s)
You do not currently have access to this content.
