Secondary electron emission generated by the impact of positive ions from insulators is generally strongly retarded due unavoidable positive charging of the target hindering the reliable characterization of the materials. Special measurement procedure utilizing a distant single-ion impact is developed and the experimental conditions to avoid the charging are found. The data on secondary electron energy distribution (SEED) in the helium ion microscope for platinum, silicon nitride, and silicon dioxide are presented. It is shown that with the help of the suggested procedure SEED can be determined for any material with a high accuracy.
REFERENCES
1.
J.
Goldstein
, D. E.
Newbury
, D. C.
Joy
, et al, Scanning Electron Microscopy and X-Ray Microanalysis
(Springer Science+Business Media
, New York
, 2007
), pp. 647
–673
; doi: .2.
G.
Hlawacek
and A.
Gölzhäuser
, Helium Ion Microscopy
(Springer International Publishing
, Switzerland
, 2016
). ISBN 978-3-319-41988-6, doi: .3.
V.
Sidorkin
, E.
van Veldhoven
, E.
van der Drift
, et al, J. Vac. Sci. Technol. B
27
, L18
(2009
); doi: .4.
N.
Kalhor
and P. F. A.
Alkemade
, “Resist Assisted Patterning” in Helium Ion Microscopy
, edited by G.
Hlawacek
and A.
Golzhauser
(Springer International Publishing
, Switzerland
, 2016
), pp. 395
–414
; doi: .5.
P. F. A.
Alkemade
and H.
Miro
, Appl. Phys. A
117
(4
), 1727
–1747
(2014
); doi: .6.
Yu. V.
Petrov
and O. F.
Vyvenko
, “Secondary Electron Generation in the Helium Ion Microscope: Basics and Imaging” in Helium Ion Microscopy
, edited by G.
Hlawacek
and A.
Golzhauser
(Springer International Publishing
, Switzerland
, 2016
), pp. 119
–146
; doi: .7.
Yu.
Petrov
and O.
Vyvenko
, Proc. of SPIE
8036
, 80360O
–1
(2011
); doi: .8.
Yu. V.
Petrov
, O. F.
Vyvenko
and A. S.
Bondarenko
, J. Surf. Inv.
4
(5
), 792
–795
(2010
); doi: 10.1134/S102745101.9.
R.
Ramachandra
, B.
Griffin
and D.
Joy
, Ultramicroscopy
109
(6
), 748
–757
(2009
); doi: .10.
K.
Ohya
, T.
Yamanaka
, K.
Inai
and T.
Ishitani
, Nucl. Instr. and Meth. in Phys. Res. B
267
(4
), 584
–589
(2009
); doi: .11.
K.
Ohya
, D.
Takami
, and T.
Yamanaka
, J. Vac. Sci. and Tech. B
29
, 06F901
(2011
). doi: .12.
K.
Ohya
, T.
Yamanaka
, D.
Takami
, et al, Proc. of SPIE
7729
, 77290V
–1
-77290V-9 (2010
); doi: .13.
K.
Ohya
and T.
Yamanaka
, Nucl. Instr. and Meth. in Phys. Res. B
315
, 295
–299
(2013
); doi: .14.
K.
Ohya
, J. Vac. Sci. and Tech. B
32
, 06FC01
(2014
); doi: .15.
V. Yu.
Mikhailovskii
, Yu. V.
Petrov
and O. F.
Vyvenko
, J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech.
9
(1
), 196
–202
(2015
); doi: 16.
C.
Rodenburg
, M. A. E.
Jepson
, S. A.
Boden
and D. M.
Bagnall
, J. Phys.: Conf. Ser.
522
, 012049
(2014
); doi: .17.
N.
Stehling
, R.
Masters
, Y.
Zhou
, R.
O’Connell
, C.
Holland
, H.
Zhang
and C.
Rodenburg
, MRS Communications
8
, 226
–240
(2018
); doi: .18.
Yu. V.
Petrov
, A. E.
Anikeva
and O. F.
Vyvenko
, Nucl. Instr. and Meth. in Phys. Res. B
425
, 11
–17
(2018
); doi: .19.
M. S.
Chung
and T. E.
Everhart
, J. Appl. Phys.
45
(2
), 707
–709
(1974
); doi: .20.
B. L.
Henke
, J.
Liesegang
and S. D.
Smith
, Phys. Rev. B
19
(6
), 3001
–3021
(1979
); doi: .21.
H. B.
Michaelson
, J. Appl. Phys.
21
, 536
–540
(1950
); doi: .22.
J.
Hölzl
, F. K.
Schulte
, H.
Wagner
, Solid Surface Physics
(Springer-Verlag
, Berlin
, 1979
). ISBN 978-3-540-09266-7, doi: .23.
J. W.
Keister
, J. E.
Rowe
, J. J.
Kolodziej
, H.
Niimi
, T. E.
Madey
, and G.
Lucovsky
, J. Vac. Sci. and Tech. B
17
, 1831
–1835
(1999
); doi: .24.
R.
Williams
, Phys. Rev. A
140
, A569
–A575
(1965
); doi: .
This content is only available via PDF.
© 2019 Author(s).
2019
Author(s)
You do not currently have access to this content.
