Mathematical modeling of 4-x mirror Fabry - Perot interferometer was made in order to use as a sensor for determining the refractive index of a liquid. After comparing different materials, silicon was chosen as the main one. The properties of silicon wafers significantly expand the functions and capabilities of the sensor and. As a result of the simulation, sensitivity up to 1600 nm / RU was obtained.
Mathematical modeling of the Fabry–Pérot interferometer based on silicon plates for application in microfluid devices
Ilya M. Pleshanov, Daniyar Sherimov, Anton O. Belorus; Mathematical modeling of the Fabry–Pérot interferometer based on silicon plates for application in microfluid devices. AIP Conf. Proc. 11 January 2019; 2063 (1): 040041. https://doi.org/10.1063/1.5087373
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