Preparation and characterization of ZnO nanotripods and nanoflowers by atmospheric pressure chemical vapor deposition (APCVD) technique

In this work, ZnO nanostructures as nanotripods and Fe-doped ZnO nanoflowers were successfully synthesized via an atmospheric pressure chemical vapor deposition (APCVD) technique with aqueous solution method and influence of Fe doping concentration on the structural properties of the films was studied. All samples were deposited on glass substrates inside reactor of APCVD system. Scanning electron microscopy (SEM) results indicated the formation of nano-structures during film growth and size of the nano grains were investigated. AFM analysis showed that the surface grains of the Fe-doped samples are homogeneous with RMS roughness values about (32nm) which less than undoped ZnO samples. Energy dispersive X-ray spectroscopy (EDS) showed that all structures contain Zn and O elements for undoped ZnO and Fe at doping state.