Polyethylene terephthalate (PET) films are useful for various applications due to the characterization of PET were flexibility, thermal resistance and chemical resistant. PET Films are widely used in both commercial and industrial today since they are highly demand in the market. In this study, microelectrode array biochip was fabricated on flexible PET film using (plate-to-plate) nanoimprint lithography (NIL). The PET films acted as substrate while PDMS as the mould. The Polydimethylsiloxane (PDMS) mould was attached on top of the PET film and additionally clamped between two pieces of glass. A mild force was applied to it for REM (replica moulding). A study was carried out upon the surface profiling of the PDMS mould and PET to monitor the possibility of deformation after applying force upon the samples. The experiment shall present the finding of required force to REM the microelectrode array biochip pattern on the PET film.

Topics
Nanolithography, Polymers, Microelectrode arrays
1.
F.
 
Samsuri
,
M. M.
 
Alkaisi
, and
J. J.
 
Evans
, “
Biochip development using nanoimprint lithography (NIL) and metallic thermal evaporation techniques for biological cells manipulation using DEP
,” in
Electrical, Control and Computer Engineering (INECCE), 2011 International Conference on
,
2011
, pp.
382
–
387
.
Google Scholar
Crossref
Search ADS
 
2.
K.
 
Chaithanya
,
K.
 
Padma
,
Y.
 
Saidulu
, and
C. G.
 
Prasad
, “
The Biochip Technology Implementation and Major Advances in Medical Applications
,”
International Journal of Advanced Research in Computer Science
, vol.
2
,
2011
.
Google Scholar
 
3.
J.
 
Cheng
,
X.
 
Wang
,
L.
 
Wu
,
W.
 
Yang
, and
J.
 
Xu
, “
Integrated biochip system for sample preparation and analysis
,” ed:
Google
 
Patents
,
2002
.
Google Scholar
 
4.
Y.
 
Temiz
,
R. D.
 
Lovchik
,
G. V.
 
Kaigala
, and
E.
 
Delamarche
, “
Lab-on-a-chip devices: How to close and plug the lab?
,”
Microelectronic Engineering
, vol.
132
, pp.
156
–
175
, 1/25/
2015
.
https://doi.org/10.1016/j.mee.2014.10.013
Google Scholar
Crossref
Search ADS
 
5.
N.
 
Kooy
,
K.
 
Mohamed
,
L.
 
Pin
, and
O.
 
Guan
, “
A review of roll-to-roll nanoimprint lithography
,”
Nanoscale Research Letters
, vol.
9
, pp.
1
–
13
, 2014/06/25
2014
.
https://doi.org/10.1186/1556-276X-9-320
Google Scholar
Crossref
Search ADS
PubMed
 
6.
S. Y.
 
Chou
, “
Nanoimprint (Technology, Tools, Applications and Commercialization) And New Technologies Beyond
,” in
Microprocesses and Nanotechnology, 2007 Digest of papers
,
2007
, pp.
4
–
4
.
Google Scholar
 
7.
B. D.
 
Gates
,
Q.
 
Xu
,
M.
 
Stewart
,
D.
 
Ryan
,
C. G.
 
Willson
, and
G. M.
 
Whitesides
, “
New approaches to nanofabrication: molding, printing, and other techniques
,”
Chemical reviews
, vol.
105
, pp.
1171
–
1196
,
2005
.
https://doi.org/10.1021/cr030076o
Google Scholar
Crossref
Search ADS
PubMed
 
8.
H.
 
Lee
,
S.
 
Hong
,
K.
 
Yang
, and
K.
 
Choi
, “
Fabrication of nano-sized resist patterns on flexible plastic film using thermal curing nano-imprint lithography
,”
Microelectronic Engineering
, vol.
83
, pp.
323
–
327
, 2//
2006
.
https://doi.org/10.1016/j.mee.2005.09.006
Google Scholar
Crossref
Search ADS
 
9.
Microchem
, “
SU-8 2000 Permanent Epoxy Negative Photoresist PROCESSING GUIDELINES FOR
,”
Revue
,
2000
.
10.
S. T.
 
Tu
,
X.
 
Yu
,
W.
 
Luan
, and
H.
 
Löwe
, “
Development of micro chemical, biological and thermal systems in China: A review
,”
Chemical Engineering Journal
, vol.
163
, pp.
165
–
179
, 10/1/
2010
.
https://doi.org/10.1016/j.cej.2010.07.021
Google Scholar
Crossref
Search ADS
 
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