Sulfur dioxide (SO2) is among the most toxic gas released by the industries which is extremely dangerous for human health. In the present communication, an attempt has been made for the detection of SO2 gas (500 ppm) with the help of SnO2 thin film based gas sensor. A low sensing response of 1.3 is obtained for sputtered SnO2 thin films based sensors at a high operating temperature of 220 °C. To improve the sensing response, different heterostructured sensors are developed by incorporating other metal oxide thin films (PdO, MgO, NiO, V2O5) over SnO2 thin film surface. Sensing response studies of different sensors towards SO2 gas (500 ppm) are presented in the present report. Among all the prepared sensors NiO-SnO2 hetero-structure sensor is showing highest sensing response (∼8) at a comparatively lower operating temperature (140 °C). Possible sensing mechanism for NiO-SnO2 heterostructured sensor has also been discussed in the present report.

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