This paper demonstrates electrostatic tuning of drive and sense modes in two-gimbal torsional gyroscope. The gyroscope is fabricated by SU-8 based UV-LIGA process and is then packaged in vacuum. The device is first characterized for frequency responses of drive and sense modes using laser Doppler vibrometer (LDV). Finally, electrostatic tuning of drive and sense modes is carried out by varying DC bias voltage applied to the proof-mass.

1.
S. E.
Alper
and
T.
Akin
, “
A planar gyroscope using standard surface micromachining process
” in
The 14th European conference on solid-state transducers
,
Copenhagen, Denmark
,
2000
, pp.
387
390
.
2.
A.
Jain
,
C.
Shekhar
and
R.
Gopal
,
Microsyst Technol
21
,
1479
1487
(
2015
).
This content is only available via PDF.
You do not currently have access to this content.