A transparent p-type thin film CuGaO2 was deposited by using RF sputtering deposition method on plastic (PET) and glass substrate. The characteristics of the film is investigated. The thin film was deposited at temperature range from 50-250°C and the pressure inside the chamber is 1.0×10−2 Torr and Argon gas was used as a working gas. The RF power is set to 100 W. The thickness of thin film is 300nm. In this experiment the transparency of the thin film is more than 70% for the visible light region. The band gap obtain is between 3.3 to 3.5 eV. The details of the results will be discussed in the conference.

Topics
Glass, Sputter deposition, Thin films, Chemical elements, Conference
1.
C.-T.
 
Su
,
H.-Y.
 
Lee
,
B.-K.
 
Wu
, and
M.-Y.
 
Chern
,
J. Cryst. Growth
, vol.
328
,
25
–
29
(
2011
).
https://doi.org/10.1016/j.jcrysgro.2011.06.012
Google Scholar
Crossref
Search ADS
 
2.
H.
 
Hosono
,
H.
 
Ohta
,
K.
 
Hayashi
,
M.
 
Orita
, and
M.
 
Hirano
, vol.
239
,
496
–
502
(
2002
)
3.
A.
 
Alias
,
K. A.
 
Mohamad
,
B. K.
 
Gosh
,
M.
 
Sakamoto
, and
K.
 
Uesugi
, no.
Ii
,
763
–
765
(
2012
).
4.
S.
 
Kim
,
H.
 
Seok
,
H.
 
Lee
,
M.
 
Lee
,
D.
 
Choi
, and
K.
 
Chai
,
Ceram. Int.
, vol.
38
,
S623
–
S626
(
2012
).
https://doi.org/10.1016/j.ceramint.2011.05.111
Google Scholar
Crossref
Search ADS
 
5.
J. D.
 
Jin
,
Y.
 
Luo
,
P.
 
Bao
,
C.
 
Brox-Nilsen
,
R.
 
Potter
, and
a. M.
 
Song
, vol.
552
,
192
–
195
(
2014
).
6.
R.
 
Brahimi
,
Y.
 
Bessekhouad
,
A.
 
Bouguelia
, and
M.
 
Trari
, vol.
186
,
242
–
247
(
2007
).
7.
C.-Y.
 
Tsay
,
K.-S.
 
Fan
,
S.-H.
 
Chen
, and
C.-H.
 
Tsai
, vol.
495
, no.
1
,
126
–
130
(
2010
).
8.
M.-M.
 
Bagheri-Mohagheghi
 and
M.
 
Shokooh-Saremi
,
Semicond. Sci. Technol.
, vol.
19
,
764
–
769
(
2004
).
https://doi.org/10.1088/0268-1242/19/6/019
Google Scholar
Crossref
Search ADS
 
9.
M. H. Z.
 
Maha
, vol.
055701
,
86
(
2012
).
10.
Y. J.
 
Zhang
,
Z. T.
 
Liu
,
D. Y.
 
Zang
,
X. S.
 
Che
,
L. P.
 
Feng
, and
X. X.
 
Bai
,
J. Phys. Chem. Solids
, vol.
74
,
1672
–
1677
(
2013
).
https://doi.org/10.1016/j.jpcs.2013.05.028
Google Scholar
Crossref
Search ADS
 
11.
a. S.
 
Reddy
,
H.-H.
 
Park
,
G. M.
 
Rao
,
S.
 
Uthanna
, and
P. S.
 
Reddy
,
J. Alloys Compd.
, vol.
474
,
401
–
405
, (
2009
).
https://doi.org/10.1016/j.jallcom.2008.06.107
Google Scholar
Crossref
Search ADS
 
12.
M.
 
Sasaki
 and
M.
 
Shimode
,
J. Phys. Chem. Solids
, vol.
64
,
1675
–
1679
, (
2003
).
https://doi.org/10.1016/S0022-3697(03)00071-4
Google Scholar
Crossref
Search ADS
 
13.
H.
 
Yanagi
,
H.
 
Kaw
,
A.
 
Kudo
,
M.
 
Yasukaw
, and
H.
 
Hosono
,
Electroceramics
,
407
–
414
, (
2000
).
https://doi.org/10.1023/A:1009959920435
Google Scholar
 
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