In this research we report a study of graphene growth using annealed silver film via hot wire cell very high frequency plasma enhanced chemical vapor deposition (HWC VHF PECVD) method with 20 sccm flow rate of methane at relatively low substrate temperature (275 °C). The silver metal catalyst-thin film was prepared by low pressure physical vapor deposition (PVD) method and the structure was optimized by annealing treatment at 600 °C in two conditions at 30 and 60 minutes. The XRD investigation shows the annealed silver film at 60 minutes has the best structure with maximum intensity located at (111) direction and 2θ = 38.12° position while interplane distance at d = 0.23 nm and lattice parameter a = 0.408 nm. UV-Vis measurement shows the maximum peak absorbance of pristine silver was at 411 nm while the annealing treatment for both did not significantly change the peaks position. On the other hand graphene deposited on the silver film have two peaks in which belong to carbon (λgraph = 400.58) and silver (λAg = 420.92 nm). Characterization of the graphene on silver was measured by Raman spectroscopy for three conditions (20, 10 and 8 watts).
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16 April 2015
THE 5TH ASIAN PHYSICS SYMPOSIUM (APS 2012)
10–12 July 2012
Bandung, Indonesia
Research Article|
April 16 2015
Study of graphene growth by HWC-VHF-PECVD method using annealed Ag films
Ahmad Rosikhin;
Ahmad Rosikhin
*
Physics of Electronic Materials Research Division, Physics Program, Faculty of Mathematics and Natural Sciences,
Institut Teknologi Bandung
Jl. Ganesha 10, Bandung 40132, Jawa Barat, Indonesia
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Toto Winata;
Toto Winata
†
Physics of Electronic Materials Research Division, Physics Program, Faculty of Mathematics and Natural Sciences,
Institut Teknologi Bandung
Jl. Ganesha 10, Bandung 40132, Jawa Barat, Indonesia
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Ajeng Eliyana
Ajeng Eliyana
Physics of Electronic Materials Research Division, Physics Program, Faculty of Mathematics and Natural Sciences,
Institut Teknologi Bandung
Jl. Ganesha 10, Bandung 40132, Jawa Barat, Indonesia
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*
e-mail : [email protected]
†
e-mail : [email protected]
AIP Conf. Proc. 1656, 030015 (2015)
Citation
Ahmad Rosikhin, Toto Winata, Ajeng Eliyana; Study of graphene growth by HWC-VHF-PECVD method using annealed Ag films. AIP Conf. Proc. 16 April 2015; 1656 (1): 030015. https://doi.org/10.1063/1.4917104
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