We propose a novel MEMS tunable optical filter with a flat-top pass band based on multi-ring resonator in an electrostatically actuated microcantilever for communication application. The filter is basically structured on a microcantilever beam and built in optical integrated ring resonator which is placed in one end of the beam to gain maximum stress on the resonator. Thus, when a DC voltage is applied, the beam will bend, that induces a stress and strain in the ring, which brings a change in refractive index and perimeter of the rings leading to change in the output spectrum shift, providing the tenability as high as 0.68nm/μN and it is capable of tuning up to 1.7nm.
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Research Article| October 15 2014
MEMS tunable optical filter based on multi-ring resonator
AIP Conf. Proc. 1620, 157–164 (2014)
Hailu Dessalegn, T. Srinivas; MEMS tunable optical filter based on multi-ring resonator. AIP Conf. Proc. 15 October 2014; 1620 (1): 157–164. https://doi.org/10.1063/1.4898234
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