Nowadays nano-coatings occupy more and more significant place in technology. Innovative, functional coatings acquire new aspects from the point of view of modern technologies, considering the aggregate of physical properties that can be achieved manipulating in the production process with the properties of coatings’ surfaces on micro- and nano-level. Nano-coatings are applied on machine parts, friction surfaces, contacting parts, corrosion surfaces, transparent conducting films (TCF), etc. The equipment available at present for the production of transparent conducting oxide (TCO) coatings with highest quality is based on expensive indium tin oxide (ITO) material; therefore cheaper alternatives are being searched for. One such offered alternative is zink oxide (ZnO) nano-coatings. Evaluating the TCF physical and mechanical properties and in view of the new ISO standard (EN ISO 25178) on the introduction of surface texture (3D surface roughness) in the engineering calculations, it is necessary to examine the height of 3D surface roughness, which is one of the most significant roughness parameters. The given paper studies the average values of 3D surface roughness height and the most often applied distribution laws are as follows: the normal distribution and Rayleigh distribution. The 3D surface is simulated by a normal random field.

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