We report on the fabrication of fully suspended two-dimensional electron and hole gases in III-V heterostructures. Low temperature transport measurements verify that the properties of the suspended gases are only slightly degraded with respect to the non-suspended gases. Focused ion beam technology is used to pattern suspended nanostructures with minimum damage from the ion beam, due to the small width of the suspended membrane.

Topics
Heterostructures, Thin film deposition
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© 2013 AIP Publishing LLC.
2013
AIP Publishing LLC
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