Neutralization of space charge in magnetic field by electrons supplied from silicon based field emitter arrays

Neutralization of the space charge in a magnetic field by the electrons supplied from a silicon based field emitter array (Si-FEA) was experimentally investigated. In this report, we have studied the trajectory of electrons emitted from a Si-FEA. The relationship between these electrons and diverging ion beam was experimentally studied. As a result, we have found that both the emitting position and the energy of the electrons were important to neutralize the diverging ion beam. In case the magnetic field was stronger than 15 mT, the electrons were trapped by the magnetic field and so removed from the ion beam, as the result, the ion beam was diverged. Ion beam neutralization was well done using low energy electrons less than 5 eV.