A beam intensity monitor for the evaluation beamline for soft x-ray optical elements

Evaluation Beamline for Soft X-Ray Optical Elements (BL-11) at the SR Center of Ritsumeikan University has been operated to measure the wavelength and angular characteristics of soft x-ray optical components in a wavelength range of 0.65-25 nm using a reflecto-diffractometer (RD). The beam intensity monitor that has been equipped in BL-11 has observed the signal of the zero-th order light. For the purpose of more accurate evaluation of the performance of optical components, a new beam intensity monitor to measure the intensity of the first order light from the monochromator in BL-11 has been developed and installed in just front of RD. The strong positive correlation between the signal of the beam monitor and a detector equipped in the RD is shown. It is successful that the beam intensity of the first order light can be monitored in real time.