There is increased industrial usage of modern tools used in cutting operations today that are coated with PVD hard coatings based on TiAlN. Coating properties such as thermal stability, hot hardness, and toughness are of interest when designing their functionality in these applications. Ti1−xAlxN films were synthesized by reactive magnetron co—sputtering with different aluminum compositions. XRD, SIMS, Nano indentation techniques were used to analyze these films. Nanoindentation hardness increases with aluminum and started to decrease beyond 81% of aluminum. Continuous Multi‐Cycle indentation technique is used to analyze the failure mode of the film with highest hardness and structural properties and on coating response to high temperature oxidation is presented.

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