Suppression of divergence of low energy neon ion beam was experimentally demonstrated by neutralizing the space charge of ion beam with low energy electrons emitted from silicon field emitter arrays (Si‐FEAs). Treatment of the FEAs with trifluoromethane plasma realized surface carbonization which was efficient to elongate the lifetime of the FEA and to improve the electron energy distribution. Together with the improvement of the performance of Si‐FEA, we have developed a novel electron deceleration system to produce low energy electrons. A low energy neon ion beam was produced and the beam property was investigated with and without the electron supply from surface carbonized Si‐FEA (Si:C‐FEA). As a result, the divergence of the neon ion beam was largely suppressed with presence of the electrons.

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