Advanced implantation systems used for semiconductor fabrication need to transport low energy ion beams. In this respect it is an advantage to employ a short beam line. Strong magnetic field in a compact footprint can enable shorter beam lines. In this work we report the use of a superconducting magnet to generate the strong magnetic field. We have developed a prototype superconducting AC magnet operating at frequencies of 80–156 Hz to sweep ion beams. We have studied the performance of ion beam sweeping using the AC superconducting magnet.

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