Ion Beam Sweeping using High Temperature Super Conducting Magnet Available to Purchase

Advanced implantation systems used for semiconductor fabrication need to transport low energy ion beams. In this respect it is an advantage to employ a short beam line. Strong magnetic field in a compact footprint can enable shorter beam lines. In this work we report the use of a superconducting magnet to generate the strong magnetic field. We have developed a prototype superconducting AC magnet operating at frequencies of 80–156 Hz to sweep ion beams. We have studied the performance of ion beam sweeping using the AC superconducting magnet.