We have studied implantation of low‐energy deuterium ions into Fe2O3 films and deuterium (D)‐uptake in Fe2O3 films, which were prepared by oxidation of Fe sheets in air at 400 °C for 20 min. X‐ray diffraction (XRD) shows that the films are mixture of hexagonal α‐Fe2O3 (hematite) and cubic γ‐Fe2O3 (maghemite). According to Rutherford backscattering spectroscopy (RBS) of 1.8 MeV H+, the composition is found to be crudely stoichiometric (Fe:O = 2:3). The samples were subjected to D2+‐plasma exposure using AC‐glow discharge. The amount of D‐uptake in Fe2O3 is evaluated to be ∼6×1016cm2 for AC voltage of 1.5 kV in 0.4 Torr of D2 gas for 15 min. The amount of D‐uptake in Fe2O3 appears to be larger by a factor of three than that in Fe. Comparisons of XRD patterns and RBS spectra before and after D2+‐plasma exposure show no appreciable change of the crystalline structure, quality and composition.

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