Lithography using synchrotron radiation in the x‐ray regime provides a powerful method to produce mechanical components of sub‐millimeter size with a very good quality for microtechnological applications. In recent years the demand for x‐ray lithography beamtime for industrial production of microparts increased rapidly resulting in the development of new experimental endstations at synchrotron radiation sources dedicated for the production of micromechanical devices. We present in this work the layout of the new x‐ray lithography beamline BL1 at the synchrotron radiation source DELTA in Dortmund and discuss first results of exposure tests.

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