Microfabrication and Device Parameter Testing of the Focal Plane Arrays for the Spider and BICEP2/Keck CMB Polarimeters Available to Purchase

Spider and BICEP2/Keck are projects to study the polarization of the cosmic microwave background (CMB). The focal planes for both require large format arrays of superconducting transition edge sensors (TES’s). A major challenge for these projects is fabricating arrays with high uniformity in device parameters. A microfabrication process is described that meets this challenge. The results from device testing are discussed. Each focal plane is composed of 4 square wafers (tiles), and each wafer contains 128 membrane‐isolated, polarization‐sensitive, antenna‐coupled TES's. After processing, selected wafers are pre‐screened in a quick‐turn‐around, cryogen‐free, $3He$ fridge. The pre‐screening is performed with a commercial resistance bridge and measures transition temperatures $(Tc)$ and normal state resistances $(Rn).$ After pre‐screening, 4 tiles at a time are fully characterized in a testbed employing a SQUID readout and SQUID mulitplexing. The tests demonstrate the values of $Tc,$ $Rn,$ thermal conductance, g, and the standard deviations of each, across a wafer and from wafer to wafer, are within design specifications.