We summarize the design and performance of the new NEC high resolution, Ångstrom level RBS system, now operational in Japan, including results for 20 Å HfO2 on Si. The detector consists of a solid angle defining aperture and a 305 mm radius, single focusing 90° magnet with a 100 mm×15 mm position sensitive, micro channel plate system. Expected scattered ion energy resolution is about 1 keV, compared to about 15 keV for standard solid state detectors. Mounted on tracks, the detector is easy to move between the 90° and 135° ports on the NEC Model RC43 analysis end station, which has multi‐axis sample positioning. Adjustable over a ±5° range of scattering angles at either port, the detector can be accurately positioned for small angle grazing measurements. A terminal ripple reduction system in the Pelletron® accelerator reduces spread in the 400 keV incident beam energy to about 40 eV. Computer controls allow unattended data acquisition with multiple detector signal gating. Off‐line analysis provides energy calibration, peak fitting, depth profiles, and reports.

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